IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nanofabrication of inorganic structures utilizing biotechnology

Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference

Author(s): I. Yamashita
Sponsor(s): Japan Soc. of Appl. Phys
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 25 October 2005
ISBN (Paper): 4-9902472-2-1
DOI: 10.1109/IMNC.2005.203718
Regular:

Several research groups proposed the introduction of biomolecules into the semiconductor process (Yamashita, 2001; Hikono et al., 2003). We proposed the fabrication of key component of quantum... View More

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