IEEE - Institute of Electrical and Electronics Engineers, Inc. - System Damping Ratio Analysis of a Capacitive Micromechanical Accelerometer

2005 6th International Conference on Electronics Packaging Technology

Author(s): Liu Xiaowei ; Chen Hong ; Chen Weiping
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Shenzhen, China
Conference Date: 30 August 2005
Page(s): 1 - 4
ISBN (Paper): 0-7803-9449-6
DOI: 10.1109/ICEPT.2005.1564696
Regular:

In this paper, system damping ratio analysis and optimization of a capacitive MEMS accelerometer is performed. To investigate the influence of damping on the system dynamic characteristics the... View More

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