IEEE - Institute of Electrical and Electronics Engineers, Inc. - Integrated Simulation Flow for Self-Consistent Manufacturability and Circuit Performance Evaluation

2005 International Conference On Simulation of Semiconductor Processes and Devices

Author(s): A. Shibkov ; V. Axelrad
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2005
Conference Location: Tokyo, Japan, Japan
Conference Date: 1 September 2005
Page(s): 127 - 130
ISBN (Paper): 4-9902762-0-5
DOI: 10.1109/SISPAD.2005.201489
Regular:

In this work we present an application of a novel DFM (Design For Manufacturability) simulation flow, which self-consistently predicts the impact of the manufacturing process on electrical circuit... View More

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