IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plasma tomography systems for industrial plasma tools

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science

Author(s): Sannon, S.C. ; Pollack, S. ; Holloway, J.P. ; Brake, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1996
Conference Location: Boston, MA, USA, USA
Conference Date: 3 June 1996
ISBN (Paper): 0-7803-3322-5
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1996.551628
Regular:

Summary form only given. Addressing the geometry constraints that have inhibited the use of optical emission based tomography systems on industrial plasma tools, the University of Michigan has... View More

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