IEEE - Institute of Electrical and Electronics Engineers, Inc. - Two-dimensional modeling of RF methane glow discharge

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science

Author(s): Bera, K. ; Farouk, B. ; Lee, Y.H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 1996
Conference Location: Boston, MA, USA, USA
Conference Date: 3 June 1996
ISBN (Paper): 0-7803-3322-5
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.1996.550850
Regular:

Summary form only given. A self-consistent two-dimensional three moment radio frequency glow discharge simulation is performed for methane gas using a fluid model. The main objective of the... View More

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