IEEE - Institute of Electrical and Electronics Engineers, Inc. - The effects of ionizing radiation on microelectromechanical systems (MEMS) actuators: electrostatic, electrothermal, and bimorph

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest

Author(s): J.R. Caffey ; P.E. Kladitis
Sponsor(s): IEEE
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2004
Conference Location: Maastricht, Netherlands, Netherlands
Conference Date: 25 January 2004
Page Count: 4
Page(s): 133 - 136
ISBN (Paper): 0-7803-8265-X
DOI: 10.1109/MEMS.2004.1290540
Regular:

The effects of ionizing radiation on the operation of polysilicon microelectromechanical systems (MEMS) electrostatic, electrothermal, and bimorph actuators were examined. All devices were... View More

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