IEEE - Institute of Electrical and Electronics Engineers, Inc. - A study on the development of a micro-positioning device for forming milli-structures

SICE 2003 Annual Conference

Author(s): Hyeun-Seok Choi ; Chang-Soo Han ; Seung-Soo Kim ; Eung-Zu Kim ; Tae-Hoon Choi ; Kyung-Hwan Na
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Fukui, Japan, Japan
Conference Date: 4 August 2003
Volume: 2
Page Count: 6
ISBN (Paper): 0-7803-8352-4
Regular:

In this paper, error compensation using an error budget method for repeatability improvement of the micro-positioning system was studied. The micro-positioning system was developed for a... View More

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