IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of a humidity sensor using quartz crystal microbalance

SICE 2003 Annual Conference

Author(s): H. Ito ; R. Kakuma ; R. Ohba ; K. Noda
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Fukui, Japan, Japan
Conference Date: 4 August 2003
Volume: 2
Page Count: 4
ISBN (Paper): 0-7803-8352-4
Regular:

Sensitive humidity sensor using Quartz Crystal Microbalance (QCM) is presented. A humidity change is detected by an oscillation frequency change depending on the mass of the absorbed H/sub 2/O... View More

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