IEEE - Institute of Electrical and Electronics Engineers, Inc. - Laser fabrication of micro sized diffractive and refractive optical devices in fused silica and glass

2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003)

Author(s): R. Bohme ; K. Zimmer
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Munich, Germany, Germany
Conference Date: 22 June 2003
Page Count: 1
ISBN (Paper): 0-7803-7734-6
DOI: 10.1109/CLEOE.2003.1313773
Regular:

In this work we will present recent results on micromachining of fused silica and different glasses. An excimer laser running at /spl lambda/=248 nm (KrF) or /spl lambda/=351 nm (XeF) (/spl... View More

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