IEEE - Institute of Electrical and Electronics Engineers, Inc. - Laser micromachining: fabrication of optical elements in quartz

2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003)

Author(s): G. Kopitkovas ; T. Lippert ; C. David ; A. Wokaun ; J. Gobrecht
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Munich, Germany, Germany
Conference Date: 22 June 2003
Page Count: 1
ISBN (Paper): 0-7803-7734-6
DOI: 10.1109/CLEOE.2003.1313618
Regular:

In tihs paper, we present a method for an one step fabrication process of micro-optical elements in quartz by combining laser induced backside wet etching (LIBWE) and a simple projection method.... View More

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