IEEE - Institute of Electrical and Electronics Engineers, Inc. - Large area thin film Si tandem module production using VHF plasma with a ladder-shaped electrode

3rd World Conference on Photovoltaic Energy Conversion

Author(s): M. Noda ; T. Nishimiya ; K. Yamaguchi ; K. Kawamura ; H. Sonobe ; M. Kuroda ; A. Yamada ; H. Takatsuka ; Y. Yamauchi ; Y. Takeuchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Osaka, Japan
Conference Date: 11 May 2003
Volume: 2
Page Count: 3
ISBN (Paper): 4-9901816-0-3
Regular:

The use of thin-film silicon for solar cells is a highly promising approach and MHI has developed the world's largest area deposition technology for a-Si modules with 1.1 m/spl times/1.4 m... View More

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