IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modified pulsed PECVD technique for nano-crystalline silicon solar cells: an effect of i-layer growth temperature

3rd World Conference on Photovoltaic Energy Conversion

Author(s): U.K. Das ; E. Centurioni ; S. Morrison ; D.L. Williamson ; A. Madan
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Osaka, Japan
Conference Date: 11 May 2003
Volume: 2
Page Count: 4
ISBN (Paper): 4-9901816-0-3
Regular:

The pulsed PECVD technique allows an increase in the electron density during the 'ON' cycle, while in the 'OFF' cycle it neutralizes the ions responsible for dust formation in the plasma. We have... View More

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