IEEE - Institute of Electrical and Electronics Engineers, Inc. - High quality a-Si/sub 1-X/C/sub X/:H window layers prepared by Cat-CVD method using graphite catalyzer under low thermal radiation conditions

3rd World Conference on Photovoltaic Energy Conversion

Author(s): K. Sugita ; M. Itoh ; A. Masuda ; H. Matsumura
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Osaka, Japan
Conference Date: 11 May 2003
Volume: 2
Page Count: 4
ISBN (Paper): 4-9901816-0-3
Regular:

High quality a-Si/sub 1-x/C/sub x/:H films can be prepared by catalytic chemical vapor deposition (Cat-CVD) method by using both graphite catalyzer and C/sub 2/H/sub 2/ gas as carbon source.... View More

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