IEEE - Institute of Electrical and Electronics Engineers, Inc. - An algorithm to convert wafer to calendar-based preventive maintenance schedules for semiconductor manufacturing systems

42nd IEEE International Conference on Decision and Control

Author(s): J.A. Ramirez-Hernandez ; E. Fernandez-Gaucherand
Sponsor(s): Honeywell Lab.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2003
Conference Location: Maui, HI, USA
Conference Date: 9 December 2003
Volume: 6
Page Count: 6
ISBN (Paper): 0-7803-7924-1
ISSN (Paper): 0191-2216
DOI: 10.1109/CDC.2003.1271954
Regular:

The work presented here is related to the area of optimal preventive maintenance (PM) scheduling in semiconductor manufacturing systems. Specifically, we develop models and algorithms to convert... View More

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