IEEE - Institute of Electrical and Electronics Engineers, Inc. - VTE - A new method for the characterisation of thin film thermophysical properties

First International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. Incorporating POLY, PEP & Adhesives in Electronics. Proceedings

Author(s): O. Kahle ; C. Uhlig ; M. Bauer
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2001
Conference Location: Potsdam, Germany, Germany
Conference Date: 21 October 2001
Page Count: 8
Page(s): 358 - 365
ISBN (Paper): 0-7803-7220-4
DOI: 10.1109/POLYTR.2001.973309
Regular:

Variable temperature ellipsometry (VTE) is a new non-destructive method for the thermophysical characterisation of (polymeric) materials in the thin film state by combining spectroscopic... View More

Advertisement