IEEE - Institute of Electrical and Electronics Engineers, Inc. - Laser via generation into flexible substrates

First International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. Incorporating POLY, PEP & Adhesives in Electronics. Proceedings

Author(s): Z. Illyefalvi-Vitez ; R. Berenyi ; P. Gordon ; J. Pinkola ; M. Ruszinko ; J. Vanfleteren
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2001
Conference Location: Potsdam, Germany, Germany
Conference Date: 21 October 2001
Page Count: 6
Page(s): 230 - 235
ISBN (Paper): 0-7803-7220-4
DOI: 10.1109/POLYTR.2001.973286
Regular:

The microelectronics industry is moving toward smaller feature sizes. The main driving forces are to improve performance and to lower cost. From the performance point of view the small distances... View More

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