IEEE - Institute of Electrical and Electronics Engineers, Inc. - Analysis of micro-object operation based on the dynamics considering the adhesion under an SEM

Proceedings of RSJ/IEEE International Conference on Intelligent Robots and Systems

Author(s): S. Saito ; H.T. Miyazaki ; T. Sato ; K. Takahashi ; T. Onzawa
Sponsor(s): IEEE Ind. Electron. Soc.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2001
Conference Location: Maui, HI, USA, USA
Conference Date: 29 October 2001
Volume: 3
Page Count: 9
ISBN (Paper): 0-7803-6612-3
DOI: 10.1109/IROS.2001.977169
Regular:

Techniques of arranging micrometer-sized objects with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Since micro-objects... View More

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