IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new isolation technology for mixed-mode and general mixed-technology SOC chips

2000 Semiconductor Manufacturing Technology Workshop

Author(s): Liao, C.P. ; Juang, K.C. ; Huang, T.H. ; Duh, D.S. ; Yang, T.T. ; Liu, M.N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Hsinchu, Taiwan, Taiwan
Conference Date: 14 June 2000
Page(s): 124 - 132
ISBN (Paper): 0-7803-6374-4
DOI: 10.1109/SMTW.2000.883093
Regular:

With higher levels of integration in VLSI, the importance of limiting undesirable interactions (i.e. crosstalk) between different circuits fabricated on a common Si substrate is increasing. Such... View More

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