IEEE - Institute of Electrical and Electronics Engineers, Inc. - Translating fab cycle time and output targets into production control requirements for tool groups

2000 Semiconductor Manufacturing Technology Workshop

Author(s): Ming-Der Hu ; Shi-Chung Chang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Hsinchu, Taiwan, Taiwan
Conference Date: 14 June 2000
Page(s): 73 - 83
ISBN (Paper): 0-7803-6374-4
DOI: 10.1109/SMTW.2000.883087
Regular:

Throughput rate and cycle time are two of the major production targets of a fab. As a fab is often operated under distributed production flow control, the overall delivery specifications can be... View More

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