IEEE - Institute of Electrical and Electronics Engineers, Inc. - Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Xing-tao Wu ; Brown, R.A. ; Mathews, S. ; Farmer, K.R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 151 - 152
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879670
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