IEEE - Institute of Electrical and Electronics Engineers, Inc. - Free space optical components and systems based on LIGA technology

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Mohr, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 147 - 148
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879668
Regular:

Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by... View More

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