IEEE - Institute of Electrical and Electronics Engineers, Inc. - Silicon bolometer and micro variable infrared filter for CO/sub 2/ measurement

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Hara, H. ; Kishi, N. ; Iwaoka, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 139 - 140
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879664
Regular:

We have developed silicon bolometers fabricated on an SOI wafer by bulk micromachining and a micro variable infrared filter, and have investigated CO/sub 2/ measurement using these elements as an... View More

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