IEEE - Institute of Electrical and Electronics Engineers, Inc. - Optical MEMS for infrared gas sensors

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Bernstein, R.W. ; Ferber, A. ; Johansen, I. ; Moe, S.T. ; Rogne, H. ; Wang, D.T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 137 - 138
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879663
Regular:

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