IEEE - Institute of Electrical and Electronics Engineers, Inc. - Microfabricated probes for near-field optical microscopy

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Heinzelmann, H. ; Eckert, R. ; Freyland, J.M. ; Gersen, H. ; Schurmann, G. ; Noell, W. ; Staufer, U. ; De Rooij, N.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 127 - 128
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879658
Regular:

Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with... View More

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