IEEE - Institute of Electrical and Electronics Engineers, Inc. - Measurement of MEMS mechanical parameters by injection interferometry

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Donati, S. ; Nogia, M. ; Lodi, V.A. ; Merlo, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 89 - 90
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879640
Regular:

In testing MEMS and MOEMS, one can use the direct observation of the device under a microscope and the functionality test in the intended mode of operation. A new diagnostic tool, also useful... View More

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