IEEE - Institute of Electrical and Electronics Engineers, Inc. - MicroOptoMechanical characterization of a mechanically deflected free-standing polymer waveguides

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Moo-Jin Choi ; Kyoung-Sun Seo ; Young-Hyun Jin ; Young-Ho Cho
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 85 - 86
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879638
Regular:

MEMS-based micro-optical devices have received increasing attention in the areas of information and optical communication. Among them, monolithically integrated optical devices show strong... View More

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