IEEE - Institute of Electrical and Electronics Engineers, Inc. - Micromachined pixel arrays integrated with CMOS for infrared applications

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Cole, B.E. ; Higashi, R.E. ; Wood, R.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 63 - 64
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879627
Regular:

Large arrays of small micromachined structures with low thermal mass and low thermal-conductance above silicon CMOS substrates and operate as (1) sensitive uncooled IR cameras or (2)... View More

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