IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fluidic self-assembly of micromirrors onto surface micromachined actuators

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Srinivasan, U. ; Helmbrecht, M. ; Rembe, C. ; Muller, R.S. ; Howe, R.T.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 59 - 60
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879626
Regular:

We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the... View More

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