IEEE - Institute of Electrical and Electronics Engineers, Inc. - Dynamic deformation of scanning mirrors

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Conant, R.A. ; Nee, J.T. ; Lau, K.Y. ; Muller, R.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 49 - 50
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879621
Regular:

Summary form only given. MEMS mirrors are capable of scanning at frequencies greater than 34 kHz. Both diffraction and dynamic deformation are dependent on the mirror size; increasing the mirror... View More

Advertisement