IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Konno, N. ; Tsugai, M. ; Yoshikawa, E. ; Usami, T. ; Fujita, R.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 11 - 12
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879603
Regular:

Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and... View More

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