IEEE - Institute of Electrical and Electronics Engineers, Inc. - Lightweight, optically flat micromirrors for fast beam steering

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Nee, J.T. ; Conant, R.A. ; Muller, R.S. ; Lau, K.Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 9 - 10
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879602
Regular:

We have demonstrated flat, lightweight micromirrors with high resonant frequencies for fast beam steering. The low mass of these tensile-optical-surface (TOS) micromirrors, which consist of... View More

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