IEEE - Institute of Electrical and Electronics Engineers, Inc. - Commercialization of optical MEMS-volume manufacturing approaches

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Markus, K.W.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 7 - 8
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879601
Regular:

This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical... View More

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