IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface-micromachined photonic integrated circuits

2000 IEEE/LEOS International Conference on Optical MEMS

Author(s): Wu, M.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Kauai, HI, USA, USA
Conference Date: 1 August 2000
Page(s): 3 - 4
ISBN (Paper): 0-7803-6257-8
DOI: 10.1109/OMEMS.2000.879599
Regular:

Summary form only given. Surface-micromachining technology offers many advantages for implementing optical MEMS. It is versatile; many different types of optical MEMS devices can be... View More

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