IEEE - Institute of Electrical and Electronics Engineers, Inc. - Nanomechanical systems: progress, challenges, and ultimate limits

58th DRC. Device Research Conference

Author(s): Roukes, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Denver, CO, USA, USA
Conference Date: 19 June 2000
Page(s): 99 - 100
ISBN (Paper): 0-7803-6472-4
DOI: 10.1109/DRC.2000.877106
Regular:

Microelectronics technology is now pushing deep into the submicron regime, yet, for the most part, work on micromachines still remains back at the few micron scale, or larger. The time is ripe to... View More

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