IEEE - Institute of Electrical and Electronics Engineers, Inc. - Low-power micromachined microsystems

Proceedings of ISLPED2000: International Symposium on Low Power Electronic Design

Author(s): K. Najafi
Sponsor(s): ACM/SIGDA
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Rapallo, Italy, Italy
Conference Date: 26 July 2000
Page Count: 8
Page(s): 1 - 8
ISBN (Paper): 1-58113-190-9
DOI: 10.1145/344166.344176
Regular:

Micromachined microsystems and micro electromechanical systems (MEMS) have made possible the development of highly accurate and portable sensors and instruments for a variety of applications in... View More

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