IEEE - Institute of Electrical and Electronics Engineers, Inc. - Orientation of PZT thin films prepared by sol-gel techniques

Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials

Author(s): Jinrong Cheng ; Laiqing Luo ; Zhongyan Meng
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Xi'an, China
Conference Date: 21 June 2000
Volume: 2
ISBN (Paper): 0-7803-5459-1
DOI: 10.1109/ICPADM.2000.876383
Regular:

The authors study the crystal orientation of PZT thin films fabricated by using sol-gel routes on [111] Pt/Ti/SiO/sub 2//Si substrates. The crystallization of PZT thin films was performed at... View More

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