IEEE - Institute of Electrical and Electronics Engineers, Inc. - Experimental results obtained by EUV laboratory tool at NewSUBARU

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference

Author(s): H. Kinoshita ; T. Watanabe
Sponsor(s): Japan Soc. Appl. Phys.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Tokyo, Japan, Japan
Conference Date: 11 July 2000
Page Count: 1
ISBN (Paper): 4-89114-004-6
DOI: 10.1109/IMNC.2000.872764
Regular:

At the Himeji Institute of Technology (HIT) the EUVL Laboratory Tool which operates at the wavelength of 13.5 nm with the 0.1 numerical aperture by using 3-mirrors imaging system has been... View More

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