IEEE - Institute of Electrical and Electronics Engineers, Inc. - Control of crystalline structure and ferroelectric properties of Pb(ZrxTi/sub 1-X/)O3 films by pulsed laser deposition

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference

Author(s): Fujita, H. ; Goto, S. ; Agata, S. ; Sakashita, M. ; Sakai, A. ; Zaima, S. ; Yasuda, Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Tokyo, Japan, Japan
Conference Date: 11 July 2000
Page(s): 276 - 277
ISBN (Paper): 4-89114-004-6
DOI: 10.1109/IMNC.2000.872761
Regular:

We have investigated Pb(Zr/sub X/Ti/sub 1-X/)O/sub 3/ (PZT) films on Pt/SiO/sub 2//Si substrates formed by pulsed laser deposition (PLD) and subsequent rapid thermal annealing (RTA) under various... View More

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