IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of magnetically driven micromirror with large angular deflection

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference

Author(s): Chang Hyeon Ji ; Yong-Kweon Kim
Sponsor(s): Japan Soc. Appl. Phys.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Tokyo, Japan, Japan
Conference Date: 11 July 2000
Page Count: 2
Page(s): 132 - 133
ISBN (Paper): 4-89114-004-6
DOI: 10.1109/IMNC.2000.872657
Regular:

In this research we have designed and fabricated electromagnetically driven micromirror by combination of surface and bulk micromachining processes. Individual mirror plate and springs occupy... View More

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