IEEE - Institute of Electrical and Electronics Engineers, Inc. - How did 300 mm manufacturing become a reality against all odds

2000 5th International Symposium on Plasma Process-Induced Damage

Author(s): Grecu, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Santa Clara, CA, USA, USA
Conference Date: 22 May 2000
ISBN (Paper): 0-9651577-4-1
DOI: 10.1109/PPID.2000.870625
Regular:

Summary form only given. The advent of the 300 mm technology has been predicted soon after the 200 mm technology became a reality and has been expected in the second half of the 90's. The severe... View More

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