IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spectroscopic ellipsometry and reflectometry: a user's perspective

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks

Author(s): H.G. Tompkins ; J.H. Baker ; S. Smith ; D. Convey
Sponsor(s): Boeing Co.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Aventura, FL, USA, USA
Conference Date: 24 July 2000
Page Count: 2
ISBN (Paper): 0-7803-6252-7
ISSN (Paper): 1099-4742
DOI: 10.1109/LEOSST.2000.869717
Regular:

We discuss how analytical tools in a characterization lab can be used to enhance metrology tools in a fab. The emphasis is on the interaction between a characterization lab and a wafer fab... View More

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