IEEE - Institute of Electrical and Electronics Engineers, Inc. - Probe detectors for mapping manufacturing defects

Proceedings of the 2000 Third IEEE International Caracas Conference on Devices, Circuits and Systems

Author(s): Zanchi, A. ; Zappa, F. ; Ghioni, M. ; Giudice, A. ; Morrison, A.P. ; Sinnis, V.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: Cancun, Mexico
Conference Date: 17 March 2000
ISBN (Paper): 0-7803-5766-3
DOI: 10.1109/ICCDCS.2000.869855
Regular:

The process-dependent defectivity of p-n junctions was investigated through the measurement of the avalanche triggering rate of single-photon avalanche diodes used as process probes. A nonlinear... View More

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