IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ion-species distribution in a high-current broad beam

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Sakudo, N. ; Hayashi, K. ; Okuji, S. ; Nishiyama, Y. ; Komatsy, K. ; Miyamoto, A. ; Yutani, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.855158
Regular:

Summary form only given. A high-current broad ion beam which is extracted with multi-aperture electrodes from a large-volume plasma has come to be required not only for processing the size-growing... View More

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