IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ablation plasma ion implantation

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Gilgenbach, R.M. ; Qi, B. ; Lau, Y.Y. ; Johnston, M.D. ; Doll, G.L.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.855022
Regular:

Summary form only given, as follows. Experimental and theoretical research are underway to investigate a new technique for implanting ions generated from solid targets: ablation-plasma-ion-View More

Advertisement