IEEE - Institute of Electrical and Electronics Engineers, Inc. - A fuzzy model of inductively coupled plasma by adaptive-network-based fuzzy inference system (ANFIS)

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Chang, C.H. ; Lin, C. ; Leou, K.C.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.855021
Regular:

Summary form only given, as follows. The chemical and physical reactions of plasma are complex and nonlinear. The controller design is limited at some operation points by the conventional method.... View More

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