IEEE - Institute of Electrical and Electronics Engineers, Inc. - Performance of the vacuum spark (VSX) and the spherical pinch (SPX) X-ray/EUV point sources

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Ahtik, I. ; Guo, X. ; Klibanov, L. ; Semyonov, O. ; Tang, W. ; Wirpszo, K.W. ; Wu, F. ; Xu, M. ; Panarella, E.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854994
Regular:

Summary form only given. The technology of X-ray/EUV point plasma sources is competing with the multiple beam synchrotrons as radiation source for submicron lithography. However, the entrance... View More

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