IEEE - Institute of Electrical and Electronics Engineers, Inc. - Plasma-surface diagnostics in LAPPS

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Walton, S.G. ; Leonhardt, D. ; Murphy, D.P. ; Fernsler, R.F. ; Meger, R.A.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854985
Regular:

Summary form only given. In situ mass and energy resolved measurements of ion and neutral fluxes to a conducting electrode surface in NRL's Large Area Plasma Processing System (LAPPS) are... View More

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