IEEE - Institute of Electrical and Electronics Engineers, Inc. - Calculation of ion energy distributions from RF plasmas using a simplified kinetic model

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Misakian, M. ; Wang, Y.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854967
Regular:

Summary form only given. Using an elementary kinetic approach, a procedure has been developed for calculating ion energy distributions (IEDs) from radio frequency Q plasmas. The calculated... View More

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