IEEE - Institute of Electrical and Electronics Engineers, Inc. - Computation and measurement of electron circulation patterns in phase space

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Kortshagen, U. ; Heil, B.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854867
Regular:

Summary form only given. We present numerical results and measurements of electron fluxes in phase space in a low-pressure inductively coupled plasma (ICP). Numerical results were obtained with a... View More

Advertisement