IEEE - Institute of Electrical and Electronics Engineers, Inc. - Experimental characterization of a compact microwave plasma source employing three different coupling geometries

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science

Author(s): Khan, A. ; Asmussen, J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2000
Conference Location: New Orleans, LA, USA, USA
Conference Date: 4 June 2000
ISBN (Paper): 0-7803-5982-8
ISSN (Paper): 0730-9244
DOI: 10.1109/PLASMA.2000.854833
Regular:

Summary form only given, as follows. The recent applications for ECR microwave ion and plasma sources has put demands on their size, low-power and high-density operation. This paper makes an... View More

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